General Info

Verity Instruments is a manufacturer of optical emission instruments and software applications for endpoint detection, advanced process control and film thickness measurement. The company has been providing optical instruments for semiconductor processing since 1980. Verity's optical emission-based instruments include spectrographs, monochromators and interference filter-based detectors. These products are used for endpoint determination in etch, ion beam etch, CVD etchback, photoresist strip and chemical/mechanical polishing. Verity instrumentation also provides for plasma diagnostics, process development, process control and film thickness measurement.